Dewetting behavior of electroplated gold layers on CVD/PVD TiN-coatings

L Grohmann, A L Heß, A. Bund - Technische Universität Ilmenau, Germany

Upscaling of thin film coating technologies for energy storage applications - some case studies

Improving quality control and productivity of vacuum based processing and leak detection by means of residual gas analysis by remote plasma emission monitoring

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